LOW ENERGY SPUTTERING OF TANTALUM THIN-FILM MICROCIRCUITS

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作者：
BEYNON, J
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ELECTRONIC ENGINEERING | 1968年 / 40卷 / 488期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：547 / &
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