EFFECTS OF ADATOM CONCENTRATION ON AU/SI(111) AND SI/AU INTERFACE FORMATION

被引:14
作者
MOLODTSOV, SL [1 ]
LAUBSCHAT, C [1 ]
SHIKIN, AM [1 ]
ADAMCHUK, VK [1 ]
机构
[1] ST PETERSBURG STATE UNIV, INST PHYS, ST PETERSBURG 198904, USSR
关键词
D O I
10.1016/0039-6028(92)91381-K
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Effects of Au(Si) adatom concentration on Au/Si(Si/Au) interface formation were investigated by photoemission and partial-electron-yield spectroscopy using synchrotron radiation, as well as by Auger-electron spectroscopy. Both interfaces are found to be reactive. The process of Au/Si(111) interface formation can be divided into three stages: for very low Au coverages, theta < 2 angstrom, Au forms a rather unreacted adlayer; in the intermediate range, 2 < theta < 25 angstrom, a reacted layer with a stoichiometry close to Au3Si is found; the high-coverage region is governed by the formation of an unreacted metallic Au phase beneath an about one reacted monolayer. For Si/Au the formation of a reacted phase is observed from the first stage of Si deposition. A model for the formation of both interfaces in terms of Au spd/Si sp hybridization is presented.
引用
收藏
页码:988 / 994
页数:7
相关论文
共 19 条
  • [1] ADAMCHUK VK, 1986, PISMA ZH TEKH FIZ+, V12, P1056
  • [2] SI - NOBLE-METAL (AU, CU, AG) INTERFACE FORMATION STUDIES BY AES
    ADAMCHUK, VK
    SHIKIN, AM
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1990, 52 : 103 - 112
  • [3] GOLD-SILICON PHASE-DIAGRAM
    ANANTATMULA, RP
    JOHNSON, AA
    GUPTA, SP
    HORYLEV, RJ
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1975, 4 (03) : 445 - 463
  • [4] ELECTRONIC-PROPERTIES OF METAL-RICH AU SI COMPOUNDS AND INTERFACES
    BISI, O
    CALANDRA, C
    BRAICOVICH, L
    ABBATI, I
    ROSSI, G
    LINDAU, I
    SPICER, WE
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1982, 15 (22): : 4707 - 4716
  • [5] BRAICOVICH L, 1980, J VAC SCI TECHNOL, V17, P1005, DOI 10.1116/1.570581
  • [6] ELECTRONIC AND CRYSTALLOGRAPHIC STRUCTURES OF SILVER ADSORBED ON SILICON (111)
    DERRIEN, J
    LELAY, G
    SALVAN, F
    [J]. JOURNAL DE PHYSIQUE LETTRES, 1978, 39 (16): : L287 - L290
  • [7] SYNCHROTRON STANDING WAVE STUDIES OF SUBMONOLAYER AU ON SI(111)
    DURBIN, SM
    BERMAN, LE
    BATTERMAN, BW
    BLAKELY, JM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 973 - 974
  • [8] AU-SI INTERFACE FORMATION - THE OTHER SIDE OF THE PROBLEM
    FRANCIOSI, A
    NILES, DW
    MARGARITONDO, G
    QUARESIMA, C
    CAPOZI, M
    PERFETTI, P
    [J]. PHYSICAL REVIEW B, 1985, 32 (10): : 6917 - 6919
  • [9] FORMATION OF NOBLE-METAL SI(100) INTERFACES
    HANBUCKEN, M
    LELAY, G
    [J]. SURFACE SCIENCE, 1986, 168 (1-3) : 122 - 132
  • [10] PHOTOELECTRON-SPECTROSCOPY STUDIES OF THE FORMATION OF THE AU-SI(100) INTERFACE USING SYNCHROTRON RADIATION
    HRICOVINI, K
    BONNET, JE
    CARRIERE, B
    DEVILLE, JP
    HANBUCKEN, M
    LELAY, G
    [J]. SURFACE SCIENCE, 1989, 211 (1-3) : 630 - 636