AMORPHOUS THIN-FILMS

被引:30
作者
WOOD, C [1 ]
GILBERT, LR [1 ]
MUELLER, R [1 ]
GARNER, CM [1 ]
机构
[1] NO ILLINOIS UNIV,PHYS DEPT,DEKALB,IL 60115
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 05期
关键词
D O I
10.1116/1.1318424
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:739 / 743
页数:5
相关论文
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