AMORPHOUS THIN-FILMS

被引：30

作者：

WOOD, C ^{[1
]}

GILBERT, LR ^{[1
]}

MUELLER, R ^{[1
]}

GARNER, CM ^{[1
]}

机构：

[1] NO ILLINOIS UNIV,PHYS DEPT,DEKALB,IL 60115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 05期

关键词：

D O I：

10.1116/1.1318424

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：739 / 743

页数：5

共 33 条

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