Mechanical properties of amorphous carbon nitride thin films prepared by reactive magnetron sputter-deposition

被引：24
作者：
Li, Dong [1 ]
Chung, Yip-Wah [1 ]
Wong, Ming-Show [2 ]
Sproul, William D. [2 ]
机构：
[1] Northwestern Univ, Robert R McCormick Sch Engn & Appl Sci, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, BIRL Ind Res Lab, Evanston, IL 60201 USA
来源：
TRIBOLOGY LETTERS | 1995年 / 1卷 / 01期
基金：
美国国家科学基金会;
关键词：
carbon nitride; sputter-deposition; stress; hardness;
D O I：
10.1007/BF00157978
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partial pressure. Under optimized deposition conditions, carbon nitride thin films with nanoindentation hardness about 25 GPa have been coated onto Si wafers and M2 steels. A strong correlation between coating hardness and compressive stress in the coating was observed.
引用
收藏
页码：87 / 93
页数：7
相关论文
共 26 条
  • [11] NANO-INDENTATION STUDIES OF ULTRAHIGH STRENGTH CARBON NITRIDE THIN-FILMS
    LI, D
    CHUNG, YW
    WONG, MS
    SPROUL, WD
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) : 219 - 223
  • [12] STRUCTURAL-PROPERTIES AND ELECTRONIC-STRUCTURE OF LOW-COMPRESSIBILITY MATERIALS - BETA-SI3N4 AND HYPOTHETICAL BETA-C3N4
    LIU, AY
    COHEN, ML
    [J]. PHYSICAL REVIEW B, 1990, 41 (15): : 10727 - 10734
  • [13] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS
    LIU, AY
    COHEN, ML
    [J]. SCIENCE, 1989, 245 (4920) : 841 - 842
  • [14] CARBON NITRIDE DEPOSITED USING ENERGETIC SPECIES - A 2-PHASE SYSTEM
    MARTON, D
    BOYD, KJ
    ALBAYATI, AH
    TODOROV, SS
    RABALAIS, JW
    [J]. PHYSICAL REVIEW LETTERS, 1994, 73 (01) : 118 - 121
  • [15] SYNTHESIS OF CARBON NITRIDE IN PLASMA-ARC
    MATSUMOTO, O
    KOTAKI, T
    SHIKANO, H
    TAKEMURA, K
    TANAKA, S
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (02) : L16 - L18
  • [16] CARBON NITROGEN PYROLYZATES - ATTEMPTED PREPARATION OF CARBON NITRIDE
    MAYA, L
    COLE, DR
    HAGAMAN, EW
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (07) : 1686 - 1688
  • [17] GENERATION AND APPLICATIONS OF COMPRESSIVE STRESS-INDUCED BY LOW-ENERGY ION-BEAM BOMBARDMENT
    MCKENZIE, DR
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (05): : 1928 - 1935
  • [18] EXPERIMENTAL REALIZATION OF THE COVALENT SOLID CARBON NITRIDE
    NIU, CM
    LU, YZ
    LIEBER, CM
    [J]. SCIENCE, 1993, 261 (5119) : 334 - 337
  • [19] PROPERTIES OF CARBON NITRIDE FILMS WITH COMPOSITION RATIO C/N=0.5-3.0 PREPARED BY THE ION AND VAPOR-DEPOSITION METHOD
    OGATA, K
    CHUBACI, JFD
    FUJIMOTO, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (06) : 3791 - 3796
  • [20] PHYSICAL-PROPERTIES OF A-C/N FILMS PRODUCED BY ION-BEAM-ASSISTED DEPOSITION
    ROSSI, F
    ANDRE, B
    VANVEEN, A
    MIJNARENDS, PE
    SCHUT, H
    LABOHM, F
    DUNLOP, H
    DELPLANCKE, MP
    HUBBARD, K
    [J]. JOURNAL OF MATERIALS RESEARCH, 1994, 9 (09) : 2440 - 2449
123