INSITU X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE ON SULFIDE PASSIVATED INP

被引：56
作者：
LAU, WM [1 ]
JIN, S [1 ]
WU, XW [1 ]
INGREY, S [1 ]
机构：
[1] BELL NO RES, STN C, OTTAWA K1Y 4H7, ONTARIO, CANADA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 04期
关键词：
D O I：
10.1116/1.584977
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：848 / 855
页数：8
相关论文
共 30 条
  • [1] THE 1ST STEPS OF THE SULFURIZATION OF III-V COMPOUNDS
    BARBOUTH, N
    BERTHIER, Y
    OUDAR, J
    MOISON, JM
    BENSOUSSAN, M
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : 1663 - 1666
  • [2] FERMI LEVEL PINNING DURING OXIDATION OF ATOMICALLY CLEAN N-INP(110)
    BERTNESS, KA
    KENDELEWICZ, T
    LIST, RS
    WILLIAMS, MD
    LINDAU, I
    SPICER, WE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 1424 - 1426
  • [3] INVESTIGATIONS OF AMMONIUM SULFIDE SURFACE TREATMENTS ON GAAS
    CARPENTER, MS
    MELLOCH, MR
    COWANS, BA
    DARDAS, Z
    DELGASS, WN
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 845 - 850
  • [4] THERMAL SULFIDATION ON INP
    DESCOUTS, B
    DURAND, J
    COT, L
    POST, G
    SCAVENEC, A
    [J]. THIN SOLID FILMS, 1985, 131 (1-2) : 139 - 148
  • [5] UTILIZATION OF THE IN-P-S CONDENSED PHASE-DIAGRAM TO ANALYZE COMPOSITION OF NATIVE SULFIDE FILMS ON INP
    GENDRY, M
    DURAND, J
    COT, L
    [J]. THIN SOLID FILMS, 1987, 150 (2-3) : 347 - 356
  • [6] GROWTH OF SULFIDE FILMS ON INP BY PLASMA SULFIDATION
    GENDRY, M
    DURAND, J
    COT, L
    HOLLINGER, G
    [J]. THIN SOLID FILMS, 1987, 149 (03) : 313 - 324
  • [7] HOLLINGER G, 1988, J MICROSC SPECT ELEC, V13, P31
  • [8] AN XPS STUDY OF GOLD DEPOSITION AT LOW-TEMPERATURES ON SULFIDE MINERALS - REDUCING AGENTS
    HYLAND, MM
    BANCROFT, GM
    [J]. GEOCHIMICA ET COSMOCHIMICA ACTA, 1989, 53 (02) : 367 - 372
  • [9] AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY ON OZONE TREATED INP SURFACES
    INGREY, S
    LAU, WM
    MCINTYRE, NS
    SODHI, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1621 - 1624
  • [10] SULFUR AS A SURFACE PASSIVATION FOR INP
    IYER, R
    CHANG, RR
    LILE, DL
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (02) : 134 - 136
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