SPUTTERING EXPERIMENTS WITH 1- TO 5-KEV AR+ ION .3. MONOCRYSTAL TARGETS OF HEXAGONAL METALS MG ZN ZR AND CD

被引：23
作者：
ROBINSON, MT
SOUTHERN, AL
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 07期
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D O I：
10.1063/1.1656798
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：3463 / &
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