X-RAY MASK HEATING DURING ELECTRON-BEAM PATTERNING

被引:6
作者
KARNEZOS, M
WEIMAR, P
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词
D O I
10.1116/1.583882
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:278 / 282
页数:5
相关论文
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