MEASUREMENT OF RESISTIVITY OF A THIN SQUARE SAMPLE WITH A SQUARE 4-PROBE ARRAY

被引：29

作者：

BUEHLER, MG ^{[1
]}

THURBER, WR ^{[1
]}

机构：

[1] NBS,DIV ELECTR TECHNOL,WASHINGTON,DC 20234

来源：

SOLID-STATE ELECTRONICS | 1977年 / 20卷 / 05期

关键词：

D O I：

10.1016/0038-1101(77)90130-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：403 / 406

页数：4

共 9 条

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[3] EVALUATION OF GEOMETRICAL EFFECTS IN 4 POINT PROBE MEASUREMENTS [J].

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SOLID-STATE ELECTRONICS, 1972, 15 (05) :577-&

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[6] SEMICONDUCTOR SHEET RESISTIVITY MEASUREMENTS ON SQUARE SAMPLES [J].

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[7]

van der Pauw L. J., 1958, PHILIPS RES REP, V1958, P1

[8] 4 POINT SHEET RESISTIVITY TECHNIQUES [J].

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REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) :885-&

[9]

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