BORON TRIBROMIDE AS A DIFFUSION SOURCE

被引：0

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作者：

THOMAS, RC ^{[1
]}

机构：

[1] SYSTONICS INC,WINCHESTER,MA 01890

来源：

SOLID STATE TECHNOLOGY | 1974年 / 17卷 / 11期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：44 / 46

页数：3

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