BORON TRIBROMIDE AS A DIFFUSION SOURCE

被引：0
|
作者：
THOMAS, RC [1 ]
机构：
[1] SYSTONICS INC,WINCHESTER,MA 01890
来源：
SOLID STATE TECHNOLOGY | 1974年 / 17卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：44 / 46
页数：3
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