GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITED FILM THICKNESS

被引：42

作者：

GREENE, JE

SEQUEDAO.F

机构：

[1] UNIV ILLINOIS, DEPT MECH & IND ENGN, URBANA, IL 61801 USA

[2] UNIV ILLINOIS, DEPT MIN & MET, COORDINATED SCI LAB, URBANA, IL 61801 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.1318510

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1144 / 1149

页数：6

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