GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITED FILM THICKNESS

被引：42

作者：

GREENE, JE

SEQUEDAO.F

机构：

[1] UNIV ILLINOIS, DEPT MECH & IND ENGN, URBANA, IL 61801 USA

[2] UNIV ILLINOIS, DEPT MIN & MET, COORDINATED SCI LAB, URBANA, IL 61801 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.1318510

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1144 / 1149

页数：6

共 22 条

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PHYSICAL REVIEW, 1930, 36 (02) :0248-0250

[5] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS [J].

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WHELAN, JM .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2509-2513

[6]

GREENE JE, 1970, B AM PHYS SOC, V15, P1614

[7] GLOW DISCHARGE LAMP FOR ROUTINE SPECTROANALYTIC MEASUREMENTS [J].

GRIMM, W .

NATURWISSENSCHAFTEN, 1967, 54 (22) :586-&

[8]

Herzberg G., 1945, ATOMIC SPECTRA ATOMI

[9]

HIPPEL AV, 1926, ANN PHYS, V80, P672

[10]

JEANS JH, 1957, DYNAMICAL THEORY GAS

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