VAPOR SOURCES FOR VACUUM DEPOSITION OF SUPERCONDUCTIVE THIN-FILM CIRCUITRY

被引:5
|
作者
LEARN, AJ
SPRIGGS, RS
机构
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1963年 / 34卷 / 02期
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D O I
10.1063/1.1718296
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:179 / &
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