VAPOR SOURCES FOR VACUUM DEPOSITION OF SUPERCONDUCTIVE THIN-FILM CIRCUITRY

被引：5
|
作者：
LEARN, AJ
SPRIGGS, RS
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1963年 / 34卷 / 02期
关键词：
D O I：
10.1063/1.1718296
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：179 / &
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