ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION

被引：58
|
作者：
MATTESON, S [1 ]
PAINE, BM [1 ]
NICOLET, MA [1 ]
机构：
[1] CALTECH,PASADENA,CA 91125
来源：
NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期
关键词：
D O I：
10.1016/0029-554X(81)90670-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：53 / 61
页数：9
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