ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION

被引：58

作者：

MATTESON, S ^{[1
]}

PAINE, BM ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期

关键词：

D O I：

10.1016/0029-554X(81)90670-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：53 / 61

页数：9

共 33 条

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