CHARACTERIZATION AND CRYSTALLITE GROWTH OF SEMICONDUCTING HIGH-TEMPERATURE-STABLE GA2O3 THIN-FILMS

被引:44
作者
FLEISCHER, M
MEIXNER, H
机构
[1] Siemens AG, Research Laboratories, Munich 83, 8000
关键词
D O I
10.1007/BF00736223
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:1728 / 1731
页数:4
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