MICROTRIBOLOGICAL PROPERTIES AND POTENTIAL APPLICATIONS OF HARD, LUBRICATING COATINGS

被引：78

作者：

MIYAKE, S ^{[1
]}

KANEKO, R ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, INTERDISCIPLINARY RES LABS, MUSASHINO, TOKYO 180, JAPAN

来源：

THIN SOLID FILMS | 1992年 / 212卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90530-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microtribology is a key technology in the information industry. In this field, atomic-scale wear and friction fluctuations degrade equipment performance. New hard, lubricating films seem to be useful in reducing wear and friction fluctuations. This paper discusses a practical surface material composition model that reduces atomic-scale wear ("achieving microtribological zero-wear"). Fluorinated silicon-containing carbon film is suggested for the surface material. The microtribological characteristics of silicon-containing carbon film are improved by fluorination, which reduces the surface energy, atomic-scale wear and friction force fluctuations.

引用

页码：256 / 261

页数：6

共 17 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].