OXIDATION OF SI IMPLANTED WITH NONDOPANT, METALLIC-IONS

被引：7

作者：

HOLLAND, OW

WHITE, CW

PENNYCOOK, SJ

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 05期

关键词：

D O I：

10.1557/JMR.1988.0898

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：898 / 906

页数：9

共 15 条

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