CHEMICAL-MECHANICAL PLANARIZATION OF ALUMINUM-BASED ALLOYS FOR MULTILEVEL METALLIZATION

被引：2
|
作者：
FURY, MA
SCHERBER, DL
STELL, MA
机构：
来源：
MRS BULLETIN | 1995年 / 20卷 / 11期
关键词：
D O I：
10.1557/S0883769400045607
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：61 / 64
页数：4
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