ESCA INVESTIGATION OF ION-BEAM SYNTHESIZED SILICON-NITRIDE PASSIVATING LAYERS ON SILICON

被引：3
|
作者：
YADAV, AD
JOSHI, MC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 191卷 / 1-3期
关键词：
D O I：
10.1016/0029-554X(81)91018-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：293 / 296
页数：4
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