ESCA INVESTIGATION OF ION-BEAM SYNTHESIZED SILICON-NITRIDE PASSIVATING LAYERS ON SILICON

被引：3
|
作者：
YADAV, AD
JOSHI, MC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 191卷 / 1-3期
关键词：
D O I：
10.1016/0029-554X(81)91018-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：293 / 296
页数：4
相关论文
共 50 条
  • [1] DIFFUSION INHIBITION AGAINST GOLD OF ION-BEAM SYNTHESIZED BURIED SILICON-NITRIDE LAYERS IN SILICON
    SKORUPA, W
    KNOTHE, P
    GROTZSCHEL, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 34 (04): : 523 - 524
  • [2] PROPERTIES OF ION-BEAM SYNTHESIZED BURIED SILICON-NITRIDE LAYERS WITH RECTANGULAR NITROGEN PROFILES
    SKORUPA, W
    WOLLSCHLAGER, K
    KREISSIG, U
    GROTZSCHEL, R
    BARTSCH, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 285 - 289
  • [3] FORMATION OF BURIED SILICON-NITRIDE AND OXYNITRIDE LAYERS IN SILICON BY ION-BEAM SYNTHESIS
    SKORUPA, W
    WOLLSCHLAGER, K
    VOELSKOW, M
    BARTSCH, H
    ALBRECHT, J
    GOTZ, J
    EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 427 - 429
  • [4] SILICON-NITRIDE LAYERS ON TOOL STEEL PRODUCED BY ION-BEAM MIXING AND ION-BEAM ASSISTED DEPOSITION
    HENSEL, E
    SOMMER, H
    KNOTHE, P
    RICHTER, E
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 112 (02): : 533 - 539
  • [5] INTERFACE PROPERTIES OF SILICON-NITRIDE DEPOSITED BY ION-BEAM SPUTTERING ON SILICON
    BOUCHIER, D
    BOSSEBOEUF, A
    GAUTHERIN, G
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C319 - C319
  • [6] ION-BEAM ASSISTED DEPOSITION OF SUBSTOICHIOMETRIC SILICON-NITRIDE
    DONOVAN, EP
    BRIGHTON, DR
    HUBLER, GK
    VANVECHTEN, D
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 983 - 986
  • [7] ION-BEAM MIXING OF CHROMIUM ON SILICON-NITRIDE CERAMICS
    BOLSE, W
    PETEVES, SD
    VREDENBERG, AM
    SARIS, FW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4): : 138 - 142
  • [8] ION-BEAM REACTIVELY SPUTTERED SILICON-NITRIDE COATINGS
    GRILL, A
    VACUUM, 1983, 33 (06) : 329 - 332
  • [9] PROPERTIES INVESTIGATION OF THIN SILICON-NITRIDE LAYERS SYNTHESIZED BY ION-IMPLANTATION
    KOMAROV, FF
    ROGALEVICH, IA
    TISHKOV, VS
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 39 (3-4): : 163 - 167
  • [10] MECHANICAL AND TRIBOLOGICAL PROPERTIES OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM ENHANCED DEPOSITION
    CHEN, YR
    LI, SZ
    ZHANG, XS
    LIU, H
    YANG, GQ
    QU, BC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 1295 - 1299
12345