ION-IMPLANTATION

被引：0
作者：
MOREHEAD, FF [1 ]
CROWDER, BL [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
SCIENTIFIC AMERICAN | 1973年 / 228卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：65 / 71
页数：7
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