CHANGES IN THE SURFACE-COMPOSITION OF SI, TIO2, AND SIO2 INDUCED BY PULSED RUBY-LASER IRRADIATION

被引：27
作者：
BERMUDEZ, VM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 01期
关键词：
D O I：
10.1116/1.571308
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
25
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页码：51 / 57
页数：7
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