LASER SURFACE ALLOYING FOR PASSIVATION OF TI-PD

被引：20

作者：

DRAPER, CW ^{[1
]}

MEYER, LS ^{[1
]}

JACOBSON, DC ^{[1
]}

BUENE, L ^{[1
]}

POATE, JM ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 03期

关键词：

D O I：

10.1016/0040-6090(81)90401-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：237 / 240

页数：4

相关论文

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