INTERACTION OF EVAPORATED PALLADIUM AND TITANIUM FILMS WITH SINGLE-CRYSTAL SILICON

被引：31
作者：
FINSTAD, TG [1 ]
NICOLET, MA [1 ]
机构：
[1] CALTECH,PASADENA,CA 91125
来源：
THIN SOLID FILMS | 1980年 / 68卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90271-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：393 / 405
页数：13
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