MONTE-CARLO SIMULATION OF ELECTRON-BEAM SCATTERING AND ENERGY-LOSS IN THIN-FILMS ON THICK SUBSTRATES

被引：0
|
作者：
KYSER, DF [1 ]
MURATA, K [1 ]
机构：
[1] IBM CORP,RES LAB,SAN JOSE,CA 95193
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C106 / C106
页数：1
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