MONTE-CARLO SIMULATION OF ELECTRON-BEAM SCATTERING AND ENERGY-LOSS IN THIN-FILMS ON THICK SUBSTRATES

被引：0

作者：

KYSER, DF ^{[1
]}

MURATA, K ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C106 / C106

页数：1

共 50 条

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