EFFECTS OF HEAT-TREATMENT ON INDIUM-TIN OXIDE-FILMS

被引:32
作者
SMITH, FTJ
LYU, SL
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D O I
10.1149/1.2127257
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:2388 / 2394
页数:7
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共 18 条
[1]   ETCHING METHODS FOR INDIUM OXIDE-TIN OXIDE-FILMS [J].
BRADSHAW, G ;
HUGHES, AJ .
THIN SOLID FILMS, 1976, 33 (02) :L5-L8
[2]   ELECTRON-CONCENTRATION AND MOBILITY IN IN2O3 [J].
DEWIT, JHW ;
VANUNEN, G ;
LAHEY, M .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1977, 38 (08) :819-824
[3]   EFFECT OF O2 PRESSURE DURING DEPOSITION ON PROPERTIES OF RF-SPUTTERED SN-DOPED IN2O3 FILMS [J].
FAN, JCC ;
BACHNER, FJ ;
FOLEY, GH .
APPLIED PHYSICS LETTERS, 1977, 31 (11) :773-775
[4]   PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].
FAN, JCC ;
BACHNER, FJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725
[5]   X-RAY PHOTOEMISSION SPECTROSCOPY STUDIES OF SN-DOPED INDIUM-OXIDE FILMS [J].
FAN, JCC ;
GOODENOUGH, JB .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3524-3531
[6]   HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].
FRASER, DB ;
COOK, HD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&
[7]   UNTERSUCHUNGEN AN HALBLEITENDEN INDIUMOXYDSCHICHTEN [J].
GROTH, R .
PHYSICA STATUS SOLIDI, 1966, 14 (01) :69-&
[8]   EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS [J].
HAINES, WG ;
BUBE, RH .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) :304-307
[9]  
KERN W, 1970, RCA REV, V31, P187
[10]   OPTICAL AND ELECTRICAL PROPERTIES OF DOPED IN2O3 FILMS [J].
KOSTLIN, H ;
JOST, R ;
LEMS, W .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 29 (01) :87-93