ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION

被引：96
作者：
MAYER, JW
TU, KN
机构：
[1] CALTECH,PASADENA,CA 91109
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期
关键词：
D O I：
10.1116/1.1318668
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：86 / 93
页数：8
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