ZINC-OXIDE FILM SYNTHESIZED BY ECR OXYGEN PLASMA

被引：6
作者：
KOKAI, H
KASHIWAGI, K
SAKAMOTO, Y
MORIKAWA, T
MURAYAMA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 11期
关键词：
D O I：
10.1143/JJAP.28.2268
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2268 / 2271
页数：4
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KURAMOCHI, S ;
MURAYAMA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1390-L1391
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