BOLTZMANN-EQUATION ANALYSES OF ELECTRON SWARM PARAMETERS IN HG/AR GAS-MIXTURES - EFFECT OF METASTABLE HG AND AR ATOMS

被引：26
|
作者：
SAWADA, S
SAKAI, Y
TAGASHIRA, H
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 02期
关键词：
D O I：
10.1088/0022-3727/22/2/008
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：282 / 288
页数：7
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