BOLTZMANN-EQUATION ANALYSES OF ELECTRON SWARM PARAMETERS IN HG/AR GAS-MIXTURES - EFFECT OF METASTABLE HG AND AR ATOMS

被引：26

作者：

SAWADA, S

SAKAI, Y

TAGASHIRA, H

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 02期

关键词：

D O I：

10.1088/0022-3727/22/2/008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：282 / 288

页数：7

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