ETCHING OF GALLIUM ARSENIDE WITH NITRIC ACID

被引：15

作者：

KYSER, DF

MILLEA, MF

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1964年 / 111卷 / 09期

关键词：

D O I：

10.1149/1.2426328

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1102 / 1104

页数：3

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