OPTICAL-WAVEGUIDES OF SINGLE-CRYSTAL LINBO3 FILM DEPOSITED BY RF SPUTTERING

被引:98
作者
TAKADA, S [1 ]
OHNISHI, M [1 ]
HAYAKAWA, H [1 ]
MIKOSHIBA, N [1 ]
机构
[1] ELECTROTECH LAB, TANASHI, TOKYO, JAPAN
关键词
D O I
10.1063/1.1655024
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:490 / 492
页数:3
相关论文
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