An ITO/Au/ITO Thin Film Gas Sensor for Methanol Detection at Room Temperature

被引：7

作者：

Jeong, Cheolwoo ^{[1
]}

Shin, Changho ^{[1
]}

Kim, Daeil ^{[1
]}

Chae, Joohyun ^{[2
]}

Kim, Yusung ^{[2
]}

机构：

[1] Univ Ulsan, Sch Mat Sci & Engn, Ulsan 680749, South Korea

[2] New Opt Ltd, Tech Inst, Miryang 627803, South Korea

来源：

TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS | 2010年 / 11卷 / 02期

关键词：

Indium tin oxide; Au; Film sensor; Conductivity; Sensitivity;

D O I：

10.4313/TEEM.2010.11.2.077

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium tin oxide (ITO) films with a 5 nm thick Au interlayer were prepared on glass substrates. The effects of the Au interlayer on the gas sensitivity for detecting methanol vapors were investigated at room temperature. The conductivity of the film sensor increased upon exposure to methanol vapor and the sensitivity also increased proportionally with the methanol vapor concentration. In terms of the sensitivity measurements, the ITO film sensor with an Au interlayer shows a higher sensitivity than that of the conventional ITO film sensor. This approach is promising in gaining improvement in the performance of ITO gas sensors used for the detection of methanol vapor at room temperature.

引用

页码：77 / 80

页数：4