DEFECT PAIR CREATION THROUGH ULTRAVIOLET-RADIATION IN DENSE, AMORPHOUS SIO2

被引:49
作者
DEVINE, RAB [1 ]
ARNDT, J [1 ]
机构
[1] UNIV TUBINGEN,INST MINERAL PETROG,W-7400 TUBINGEN 1,GERMANY
来源
PHYSICAL REVIEW B | 1990年 / 42卷 / 04期
关键词
D O I
10.1103/PhysRevB.42.2617
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Defect creation in 24% densified, high-OH-concentration amorphous SiO2 has been studied using 248-nm excimer laser radiation. Combining laser and -ray radiation data, we find correlated growth of oxygen-vacancy and nonbridging oxygen-hole-center defects over a range of concentration from 5×1015 to 5×1017 cm-3. Oxygen-hole centers are created at least 100 times more efficiently in densified, high-OH-concentration SiO2 than in undensified, high-OH-concentration SiO2 for the same 248-nm-radiation dose. It is argued that strained bond cleavage is the dominant mechanism of defect creation by energetic photons in metastably densified oxides. The primary oxygen-vacancy-center creation mechanism by ultraviolet radiation in undensified, high-OH-concentration SiO2 appears to be network-atom-displacement related. © 1990 The American Physical Society.
引用
收藏
页码:2617 / 2620
页数:4
相关论文
共 25 条
[1]   2-PHOTON PROCESSES IN DEFECT FORMATION BY EXCIMER LASERS IN SYNTHETIC SILICA GLASS [J].
ARAI, K ;
IMAI, H ;
HOSONO, H ;
ABE, Y ;
IMAGAWA, H .
APPLIED PHYSICS LETTERS, 1988, 53 (20) :1891-1893
[2]  
ARNDT J, 1969, PHYS CHEM GLASSES, V10, P117
[3]   A STUDY OF THIN SILICON DIOXIDE FILMS USING INFRARED-ABSORPTION TECHNIQUES [J].
BOYD, IW ;
WILSON, JIB .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4166-4172
[4]   MULTIPHOTON ABSORPTION-COEFFICIENTS IN SOLIDS - A UNIVERSAL CURVE [J].
BRANDI, HS ;
DEARAUJO, CB .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1983, 16 (30) :5929-5936
[5]   LASER-INDUCED MODIFICATIONS AND THE MECHANISM OF INTRINSIC DAMAGE IN WIDE GAP OPTICAL-MATERIALS [J].
BRAUNLICH, P ;
JONES, SC ;
SHEN, XA ;
CASPER, RT ;
KELLY, P .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :224-230
[6]   DEFECT CREATION AND 2-PHOTON ABSORPTION IN AMORPHOUS SIO2 [J].
DEVINE, RAB .
PHYSICAL REVIEW LETTERS, 1989, 62 (03) :340-340
[7]   SI-O BOND-LENGTH MODIFICATION IN PRESSURE-DENSIFIED AMORPHOUS SIO2 [J].
DEVINE, RAB ;
ARNDT, J .
PHYSICAL REVIEW B, 1987, 35 (17) :9376-9379
[8]   ULTRAVIOLET-INDUCED DEFECT CREATION IN AMORPHOUS SIO2 EXPOSED TO AN O2 PLASMA [J].
DEVINE, RAB ;
FRANCOU, JM ;
INARD, A ;
PELLETIER, J .
APPLIED PHYSICS LETTERS, 1990, 56 (16) :1549-1551
[9]   CORRELATED DEFECT CREATION AND DOSE-DEPENDENT RADIATION SENSITIVITY IN AMORPHOUS SIO2 [J].
DEVINE, RAB ;
ARNDT, J .
PHYSICAL REVIEW B, 1989, 39 (08) :5132-5138
[10]  
DEVINE RAB, 1986, MATER RES SOC S P, V61, P177