OPTICAL-CONSTANTS OF SILICON AND DRY OXYGEN OXIDES OF SILICON AT 5461A

被引：113

作者：

TAFT, EA

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 06期

关键词：

D O I：

10.1149/1.2131600

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：968 / 972

页数：5

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