SILICON HETEROJUNCTION BIPOLAR POWER TRANSISTOR WITH AN AMORPHOUS SI-B ALLOY EMITTER

被引：20
作者：
LI, XH
CARLSSON, JRA
JOHANSSON, M
EKSTROM, B
GONG, SF
HENTZELL, HTG
机构：
[1] Thin Film Division, Department of Physics and Measurement Technology, Linköping University
来源：
APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 11期
关键词：
D O I：
10.1063/1.107577
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A pnp Si heterojunction bipolar power transistor has been fabricated using an amorphous Si0.7B0.3 alloy as a wide band-gap emitter. The amorphous alloy is formed by co-deposition of B and Si: it has a low resistivity of 2.5 X 10(-3) OMEGA cm at room temperature after annealing at 1000-degrees-C for 30 min and a band gap of 1.70 eV when annealed at 1100-degrees-C for 20 min. In order to make a direct comparison, a conventional transistor with a diffused emitter and a polycrystalline silicon (poly-Si) emitter transistor have also been fabricated. It is shown that an amorphous Si0.7B0.3 alloy emitter transistor can have an electrical current gain 2-5 times higher than a poly-Si emitter transistor and 20 times higher than a conventional transistor.
引用
收藏
页码：1316 / 1318
页数：3
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