THERMAL-OXIDATION OF GAAS IMPLANTED BY ANTIMONY, PHOSPHORUS, AND BORON IONS

[1] THE EFFECTS OF ION-IMPLANTATION ON THE THERMAL-OXIDATION OF GAAS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4): : 203 - 206

[2] KLOSE H, 1982, WISS L HUMBOLDT U BE, V31, P325

[3] Kulikov I.S., 1986, TERMODINAMIKA OKSIDO

[4] MITTOVA IY, 1985, ZH FIZ KHIM+, V59, P758

[5] MITTOVA IY, 1986, ZH FIZ KHIM+, V60, P1607

[6] MITTOVA IY, 1987, IAN SSSR NEORG MATER, V23, P717

[7] MITTOVA IY, 1986, THEORY PRACTICE PHYS, P122

[8] PHYSICAL STRUCTURE OF THE INTERFACE BETWEEN SINGLE-CRYSTAL GAAS AND ITS OXIDE FILM [J]. THIN SOLID FILMS, 1979, 56 (1-2) : 163 - 171

[9] NEW TECHNIQUE FOR GROWTH OF THERMAL OXIDE-FILMS ON GAAS [J]. SURFACE SCIENCE, 1979, 86 (JUL) : 264 - 271

[10] UGAI YA, 1984, ZH FIZ KHIM+, V58, P588

[1] THE EFFECTS OF ION-IMPLANTATION ON THE THERMAL-OXIDATION OF GAAS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4): : 203 - 206

[2] KLOSE H, 1982, WISS L HUMBOLDT U BE, V31, P325

[3] Kulikov I.S., 1986, TERMODINAMIKA OKSIDO

[4] MITTOVA IY, 1985, ZH FIZ KHIM+, V59, P758

[5] MITTOVA IY, 1986, ZH FIZ KHIM+, V60, P1607

[6] MITTOVA IY, 1987, IAN SSSR NEORG MATER, V23, P717

[7] MITTOVA IY, 1986, THEORY PRACTICE PHYS, P122

[8] PHYSICAL STRUCTURE OF THE INTERFACE BETWEEN SINGLE-CRYSTAL GAAS AND ITS OXIDE FILM [J]. THIN SOLID FILMS, 1979, 56 (1-2) : 163 - 171

[9] NEW TECHNIQUE FOR GROWTH OF THERMAL OXIDE-FILMS ON GAAS [J]. SURFACE SCIENCE, 1979, 86 (JUL) : 264 - 271

[10] UGAI YA, 1984, ZH FIZ KHIM+, V58, P588