X-RAY PHOTOELECTRON AND INFRARED-SPECTROSCOPY OF MICROWAVE PLASMA ETCHED POLYIMIDE SURFACES

被引：25
作者：
CHOU, NJ
PARASZCZAK, J
BABICH, E
HEIDENREICH, J
CHAUG, YS
GOLDBLATT, RD
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574761
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1321 / 1326
页数：6
相关论文
共 15 条
  • [1] BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
  • [2] MECHANISM OF OXYGEN PLASMA-ETCHING OF POLYDIMETHYL SILOXANE FILMS
    CHOU, NJ
    TANG, CH
    PARASZCZAK, J
    BABICH, E
    [J]. APPLIED PHYSICS LETTERS, 1985, 46 (01) : 31 - 33
  • [3] PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4
    EGITTO, FD
    EMMI, F
    HORWATH, RS
    VUKANOVIC, V
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 893 - 904
  • [4] HEIDENREICH JE, 1986, P MICROCIRCUIT ENG 8, P363
  • [5] SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS
    ISHIDA, H
    WELLINGHOFF, ST
    BAER, E
    KOENIG, JL
    [J]. MACROMOLECULES, 1980, 13 (04) : 826 - 834
  • [6] LEARY HJ, 1981, ACS S SER, V162, P147
  • [7] PARASZCZAK J, 1985, P MICROCIRCUIT ENG 8, P397
  • [8] PARASZCZAK J, 1984, P MICROCIRCUIT ENG, P517
  • [9] POUCHERT CJ, ALDRICH LIBRARY INFR
  • [10] ROBINSON B, 1984, FAL M EL SOC NEW ORL
12