PROPERTIES OF SPUTTERED NITRIDE SEMICONDUCTORS

被引：42
作者：
TANSLEY, TL
EGAN, RJ
HORRIGAN, EC
机构：
来源：
THIN SOLID FILMS | 1988年 / 164卷
关键词：
D O I：
10.1016/0040-6090(88)90174-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：441 / 448
页数：8
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