STUDY OF AL-PD2SI CONTACTS ON SI

被引：43

作者：

GRINOLDS, H ^{[1
]}

ROBINSON, GY ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569177

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：75 / 78

页数：4

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