CHARACTERIZATION OF THE IMPLANTATION DAMAGE IN SIO2 WITH X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：17
作者：
AJIOKA, T
USHIO, S
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 20期
关键词：
D O I：
10.1063/1.96921
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1398 / 1399
页数：2
相关论文
共 15 条
[11]  
LINHARD J, 1963, MAT FYS MEDD PAN VID, V33, P3
[12]   IONIZATION DILATATION EFFECTS IN FUSED SILICA FROM 2 TO 18-KEV ELECTRON-IRRADIATION [J].
NORRIS, CB ;
EERNISSE, EP .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (09) :3876-3882
[13]  
NUCHO RN, 1978, PHYSICS SIO2 ITS INT, P60
[14]   EXTRUSION OF QUARTZ ON ION-BOMBARDMENT - FURTHER EVIDENCE FOR RADIATION-INDUCED STRESS RELAXATION OF SILICA NETWORK [J].
PRIMAK, W .
PHYSICAL REVIEW B, 1976, 14 (10) :4679-4686
[15]   CHANGES IN CHEMICAL STABILITY OF ION-IMPLANTED SILICA GLASS [J].
WEBB, AP ;
HOUGHTON, AJ ;
TOWNSEND, PD .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 30 (03) :177-182
12