INVESTIGATION AND DESIGN OF OPTICAL-PROPERTIES OF POROSITY SUPERLATTICES

被引：94

作者：

BERGER, MG ^{[1
]}

THONISSEN, M ^{[1
]}

ARENSFISCHER, R ^{[1
]}

MUNDER, H ^{[1
]}

LUTH, H ^{[1
]}

ARNTZEN, M ^{[1
]}

THEISS, W ^{[1
]}

机构：

[1] RHEIN WESTFAL TH AACHEN, INST PHYS 1, D-52056 AACHEN, GERMANY

来源：

THIN SOLID FILMS | 1995年 / 255卷 / 1-2期

关键词：

LUMINESCENCE; MULTILAYERS; OPTICAL PROPERTIES; SILICON;

D O I：

10.1016/0040-6090(94)05617-M

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have investigated the optical properties of porosity superlattices and complex multilayer systems. Type II superlattices reveal a more complex layer structure than expected from the substrate doping levels. Type I layer systems have been used to form highly reflective layer systems and Fabry-Perot filters.

引用

页码：313 / 316

页数：4

共 9 条

[1] POROSITY SUPERLATTICES - A NEW CLASS OF SI HETEROSTRUCTURES [J].

BERGER, MG ;

DIEKER, C ;

THONISSEN, M ;

VESCAN, L ;

LUTH, H ;

MUNDER, H ;

THEISS, W ;

WERNKE, M ;

GROSSE, P .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (06) :1333-1336

[2]

BERGER MG, 1993, Patent No. 319413333

[3]

BERGER MG, 1994, WIN P HOUCH WINT SCH

[4]

FOROUHI AR, 1991, HDB OPTICAL CONSTANT, V2

[5] APPLICATION OF POROUS SILICON FORMATION SELECTIVITY TO IMPURITY PROFILING IN P-TYPE SILICON SUBSTRATES [J].

LIGEON, M ;

MULLER, F ;

HERINO, R ;

GASPARD, F ;

HALIMAOUI, A ;

BOMCHIL, G .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (08) :3814-3819

[6]

MUNDER H, 1994, 1993 P ICFSI4

[7]

STFROHNHOFF MG, 1995, THIN SOLID FILMS, V255

[8]

THEISS W, SCOUT DOING OPTICS C

[9] OPTICAL-PROPERTIES OF POROUS SILICON SUPERLATTICES [J].

VINCENT, G .

APPLIED PHYSICS LETTERS, 1994, 64 (18) :2367-2369

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