PLASMA DISCHARGE CLEANING OF REPLICA GRATINGS CONTAMINATED BY SYNCHROTRON RADIATION

被引：25
|
作者：
MCKINNEY, WR [1 ]
TAKACS, PZ [1 ]
机构：
[1] BROOKHAVEN NATL LAB,DIV INSTRUMENTAT,UPTON,NY 11973
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 195卷 / 1-2期
关键词：
D O I：
10.1016/0029-554X(82)90802-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：371 / 374
页数：4
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