PLASMA DISCHARGE CLEANING OF REPLICA GRATINGS CONTAMINATED BY SYNCHROTRON RADIATION

被引:25
|
作者
MCKINNEY, WR [1 ]
TAKACS, PZ [1 ]
机构
[1] BROOKHAVEN NATL LAB,DIV INSTRUMENTAT,UPTON,NY 11973
来源
关键词
D O I
10.1016/0029-554X(82)90802-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:371 / 374
页数:4
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