Silica-Based Sol-Gel Films Doped with Active Elements

被引:22
作者
Almeida, R. M. [1 ]
Orignac, X. [1 ]
Barbier, D. [2 ]
机构
[1] Inst Super Tecn, INESC, P-1000 Lisbon, Portugal
[2] GeeO, F-38031 Grenoble, France
关键词
sol-gel films; spin-coating; optical films; rare earth doping;
D O I
10.1007/BF00486292
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The preparation of glassy films doped with rare earth ions is important for planar waveguide fabrication in active integrated optic devices. The sol-gel process is a promising route for the preparation of such films and the eventual overcoming of the problem of rare earth clustering. In the present work, both SiO2 and 90SiO(2)-10TiO(2) films were prepared by spin coating on silica glass or single crystal silicon substrates and they were doped with neodymium in a Nd/Si atomic ratio up to 15%, using NdCl3 as precursor. These films were subjected to selected heat treatments and their thickness and infrared spectra were measured. The refractive index and porosity were also determined for some of the samples. Visible absorption spectra were then measured in bulk gels, due to the insufficient optical path of the films.
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页码:465 / 467
页数:3
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