PREPARATION AND PROPERTIES OF HIGH-QUALITY A-SI FILMS WITH A SUPER CHAMBER (SEPARATED ULTRAHIGH-VACUUM REACTION CHAMBER)

被引：54
|
作者：
TSUDA, S
TAKAHAMA, T
ISOMURA, M
TARUI, H
NAKASHIMA, Y
HISHIKAWA, Y
NAKAMURA, N
MATSUOKA, T
NISHIWAKI, H
NAKANO, S
OHNISHI, M
KUWANO, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 01期
关键词：
D O I：
10.1143/JJAP.26.33
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：33 / 38
页数：6
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