Photoluminescence and electrophysical properties of p-type ZnO layers implanted with V Group elements

被引:0
作者
Kotlyarevsky, M. B. [1 ]
Rogozin, I. V. [2 ]
Marakhovsky, O. V. [2 ]
机构
[1] ARIU, Acad Management & Informat Technol, 3 Uritsky St, UA-71100 Berdyansk, Ukraine
[2] Berdyansk State Pedag Univ, UA-71100 Berdyansk, Ukraine
来源
FUNCTIONAL MATERIALS | 2005年 / 12卷 / 04期
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ion implantation of arsenic and nitrogen into zinc oxide film (As and N being acceptor impurities in ZnO) has been shown to result in formation of the hole conductivity only if the film is annealed in the presence of oxygen radicals. The ion implantation and subsequent anneal influence not only the electric properties but also the photoluminescence spectra of ZnO:Ga:As+ (ZnO:Ga:N+) layers. The luminescence bands due to As and N introduction appear in the UV and visible spectral regions.
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页码:616 / 621
页数:6
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